Synthesis of Highly Pure and Hydrophilic Metal-Nitride Thin Films Using Reactive High-Frequency Magnetron Sputtering. Innovative Technology and Management Journal, [S. l.], v. 6, n. 1, 2025. DOI: 10.70954/r4xh8r82. Disponível em: https://journal.evsu.edu.ph/index.php/itmj/article/view/42. Acesso em: 24 aug. 2025.